High performance nonlinear micro energy harvester integrated with (K, Na)NbO3/Si composite quad-cantilever

Author

Le Van Minh ; Hara, Masaki ; Kuwano, Hiroki

Author_Institution

Tohoku Univ., Sendai, Japan

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

397

Lastpage

400

Abstract

We developed a lead-free (K, Na)NbO₃ nonlinear micro energy harvester. The harvester was densely integrated with a quatrefoil-shaped proof mass and quad-cantilevers using bulk micromachining. The KNN/Si composite cantilever was integrated with two-separated metal (Pt/Ti)/ KNN/ metal (Pt/Ti) structure to effectively collect charge. Clamped-clamped beam design was also adopted for wide band operation. The harvester showed wide bandwidth of 253 Hz (fractional bandwidth: 12.9%) at acceleration of 6 m/s². The power density of 1623 μW/cm³ was achieved at the same acceleration. It is the highest value among the wide bandwidth piezoelectric energy harvesters.

Keywords

cantilevers; energy harvesting; micromachining; piezoelectric transducers; potassium compounds; silicon; sodium compounds; (KNa)NbO₃-Si; KNN-Si composite cantilever; clamped-clamped beam; composite quad-cantilever; micromachining; nonlinear microenergy harvester; piezoelectric energy harvesters; quad-cantilevers; quatrefoil-shaped proof mass; Acceleration; Bandwidth; Density measurement; Finite element analysis; Power system measurements; Silicon; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765660

Filename

6765660