Title :
High performance nonlinear micro energy harvester integrated with (K, Na)NbO3/Si composite quad-cantilever
Author :
Le Van Minh ; Hara, Masaki ; Kuwano, Hiroki
Author_Institution :
Tohoku Univ., Sendai, Japan
Abstract :
We developed a lead-free (K, Na)NbO3 nonlinear micro energy harvester. The harvester was densely integrated with a quatrefoil-shaped proof mass and quad-cantilevers using bulk micromachining. The KNN/Si composite cantilever was integrated with two-separated metal (Pt/Ti)/ KNN/ metal (Pt/Ti) structure to effectively collect charge. Clamped-clamped beam design was also adopted for wide band operation. The harvester showed wide bandwidth of 253 Hz (fractional bandwidth: 12.9%) at acceleration of 6 m/s2. The power density of 1623 μW/cm3 was achieved at the same acceleration. It is the highest value among the wide bandwidth piezoelectric energy harvesters.
Keywords :
cantilevers; energy harvesting; micromachining; piezoelectric transducers; potassium compounds; silicon; sodium compounds; (KNa)NbO3-Si; KNN-Si composite cantilever; clamped-clamped beam; composite quad-cantilever; micromachining; nonlinear microenergy harvester; piezoelectric energy harvesters; quad-cantilevers; quatrefoil-shaped proof mass; Acceleration; Bandwidth; Density measurement; Finite element analysis; Power system measurements; Silicon; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765660
