Nano-porous SIO2 electret with high surface potential and high thermal resistance

Author

Suzuki, M. ; Wada, Tomotaka ; Takahashi, Tatsuro ; Nishida, Tsutomu ; Yoshikawa, Yasuhiro ; Aoyagi, Shigehisa

Author_Institution

Kansai Univ., Suita, Japan

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

417

Lastpage

420

Abstract

This paper proposes a new electret with high surface potential and high thermal resistance, which is made of nano-porous SiO₂. Electrical charge density in the nano-porous SiO₂ is higher than that in a normal (i.e., nonporous) SiO₂ because there are many voids in the nano-porous SiO₂ and the interface between void and SiO₂ traps electrical charges strongly. Therefore, decrease rate of the trapped charge density in the nano-porous SiO₂ is lower than that of normal SiO₂. Since SiO₂ is thermally stable, thermal stability of the electrical charge in nano-porous SiO₂ electret is better than that in a polymer electret. Output power generated by vibration energy harvesting using the nano-porous SiO₂ electret is also larger than that using the normal SiO₂ or polymer electret.

Keywords

electrets; energy harvesting; nanoporous materials; silicon compounds; surface potential; thermal resistance; thermal stability; electrical charge density; electrical charges; energy harvesting; nanoporous electret; nanoporous materials; polymer electret; surface potential; thermal resistance; thermal stability; void; Electrets; Power generation; Resistance; Silicon; Substrates; Thermal stability; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765665

Filename

6765665