• DocumentCode
    267876
  • Title

    Graphene synthesis via droplet CVD AND its photonic applications

  • Author

    Xining Zang ; Liwei Lin

  • Author_Institution
    Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, Berkeley, CA, USA
  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    486
  • Lastpage
    489
  • Abstract
    The process of “droplet CVD” for the synthesis of graphene sheets and its photonic applications have been demonstrated. Metal (Cu or Ni) droplets are naturally transformed from thin films under high temperature and used as the catalysts to grow graphene via the chemical vapor deposition (CVD) process. This work has achieved several advancements: (1) first demonstration of “droplet CVD” for graphene synthesis; (2) constructions of continuous graphene sheets with discontinuous metal droplets - readily available for graphene sensing applications; and (3) preliminary proof-of-concept demonstration of a photonic sensor based on the droplet CVD graphene. As such, this new class of fabrication process could open up various graphene-based device/system applications, including photonic sensors.
  • Keywords
    chemical vapour deposition; graphene; optical sensors; scanning electron microscopy; C; SEM; catalysts; chemical vapor deposition; droplet CVD; graphene sensing; graphene sheets; metal droplets; photonic sensor; thin films; Copper; Films; Graphene; Nickel; Photonics; Resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765683
  • Filename
    6765683