Title :
Implications of in-plane stretch and thickness compression coupled to flexure on the lower bound of BAW acceleration sensitivity
Author :
Kosinski, John A. ; Pastore, Robert A., Jr. ; Yang, Jiashi
Author_Institution :
US Army CECOM, Fort Monmouth, NJ, USA
Abstract :
It is known that the acceleration-induced frequency shift vanishes for an ideal, symmetrically mounted bulk acoustic wave resonator subjected to certain types of deformations. We show here that the acceleration-induced frequency shift does not vanish and is not insignificant for certain deformations previously unconsidered
Keywords :
acceleration; bending; bulk acoustic wave devices; crystal resonators; BAW acceleration sensitivity; acceleration-induced frequency shift; biasing deformation; body forces; flexure; in-plane stretch; lower bound; symmetrically mounted BAW resonator; thickness compression; Acceleration; Acoustic waves; Capacitive sensors; Frequency; Nonlinear equations; Plasma welding; Stress; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location :
Kansas City, MO
Print_ISBN :
0-7803-5838-4
DOI :
10.1109/FREQ.2000.887379
