• DocumentCode
    2678790
  • Title

    Implications of in-plane stretch and thickness compression coupled to flexure on the lower bound of BAW acceleration sensitivity

  • Author

    Kosinski, John A. ; Pastore, Robert A., Jr. ; Yang, Jiashi

  • Author_Institution
    US Army CECOM, Fort Monmouth, NJ, USA
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    345
  • Lastpage
    347
  • Abstract
    It is known that the acceleration-induced frequency shift vanishes for an ideal, symmetrically mounted bulk acoustic wave resonator subjected to certain types of deformations. We show here that the acceleration-induced frequency shift does not vanish and is not insignificant for certain deformations previously unconsidered
  • Keywords
    acceleration; bending; bulk acoustic wave devices; crystal resonators; BAW acceleration sensitivity; acceleration-induced frequency shift; biasing deformation; body forces; flexure; in-plane stretch; lower bound; symmetrically mounted BAW resonator; thickness compression; Acceleration; Acoustic waves; Capacitive sensors; Frequency; Nonlinear equations; Plasma welding; Stress; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
  • Conference_Location
    Kansas City, MO
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-5838-4
  • Type

    conf

  • DOI
    10.1109/FREQ.2000.887379
  • Filename
    887379