DocumentCode
2678790
Title
Implications of in-plane stretch and thickness compression coupled to flexure on the lower bound of BAW acceleration sensitivity
Author
Kosinski, John A. ; Pastore, Robert A., Jr. ; Yang, Jiashi
Author_Institution
US Army CECOM, Fort Monmouth, NJ, USA
fYear
2000
fDate
2000
Firstpage
345
Lastpage
347
Abstract
It is known that the acceleration-induced frequency shift vanishes for an ideal, symmetrically mounted bulk acoustic wave resonator subjected to certain types of deformations. We show here that the acceleration-induced frequency shift does not vanish and is not insignificant for certain deformations previously unconsidered
Keywords
acceleration; bending; bulk acoustic wave devices; crystal resonators; BAW acceleration sensitivity; acceleration-induced frequency shift; biasing deformation; body forces; flexure; in-plane stretch; lower bound; symmetrically mounted BAW resonator; thickness compression; Acceleration; Acoustic waves; Capacitive sensors; Frequency; Nonlinear equations; Plasma welding; Stress; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
Conference_Location
Kansas City, MO
ISSN
1075-6787
Print_ISBN
0-7803-5838-4
Type
conf
DOI
10.1109/FREQ.2000.887379
Filename
887379
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