Title :
Release and transfer of large-area ultra-thin PDMS
Author :
Jinsheng Gao ; Dongzhi Guo ; Santhanam, S. ; YingJu Yu ; McGaughey, Alan J. H. ; Shi-Chune Yao ; Fedder, Gary K.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This paper reports on the fabrication of ultra-thin (~10 μm) polydimethylsiloxane (PDMS) films with embedded metal electrodes of 2 μm minimum feature size, as well as the release and transfer of large area films (>5 cm). The initial motivation for this work is the development of a miniature pump actuator for moving working fluid in an electrocaloric microcooler. PDMS diaphragms with electrodes are released and transferred onto contoured silicon chambers formed by gray-scale lithography and deep-reactive ion etching.
Keywords :
diaphragms; microactuators; microelectrodes; photolithography; polymer films; sputter etching; PDMS diaphragms; contoured silicon chambers; deep-reactive ion etching; electrocaloric microcooler; embedded metal electrodes; gray-scale lithography; large-area ultra-thin PDMS; miniature pump actuator; ultrathin polydimethylsiloxane film fabrication; working fluid; Electrodes; Fabrication; Films; Fluids; Metals; Silicon; Substrates; PDMS transfer; diaphragm with electrode; electrocaloric cooling;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765698
