Title :
A charge based sigma delta capacitive sensor for ultrathin polyelectrolyte layer detection
Author :
Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad
Author_Institution :
Dept. of Electr. Eng., Polystim Neurotechnologies Lab., Montreal, QC
Abstract :
In this paper, we present a hybrid microfluidic/CMOS sensor for lab-on-chip (LoC) applications. This hybrid device features a sigma delta (SigmaDelta) capacitive sensor implemented through 0.18 mum CMOS process, a direct-write microfluidic channel and ultrathin polyelectrolyte layers (PLs). We demonstrate the simulation and experimental results and show the viability of the proposed sensor for molecular detection purposes using chitosan and alginate solutions.
Keywords :
CMOS integrated circuits; capacitive sensors; flow sensors; microfluidics; polymer electrolytes; alginate solution; charge based sigma delta capacitive sensor; chitosan solution; direct-write microfluidic channel; hybrid microfluidic-CMOS sensor; lab-on-chip applications; molecular detection purposes; ultrathin polyelectrolyte layer detection; Capacitance; Capacitive sensors; Circuits; DNA; Delta-sigma modulation; Dielectrics; Electrodes; Lab-on-a-chip; Microfluidics; Voltage;
Conference_Titel :
Circuits and Systems and TAISA Conference, 2008. NEWCAS-TAISA 2008. 2008 Joint 6th International IEEE Northeast Workshop on
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-2331-6
Electronic_ISBN :
978-1-4244-2332-3
DOI :
10.1109/NEWCAS.2008.4606317
