Title :
Bi-chamber electromagnetic fluidic pump
Author :
Gudeman, Chris ; Rubel, Paul ; Foster, J.
Author_Institution :
Innovative Micro Technol., Goleta, CA, USA
Abstract :
This paper reports the design, fabrication and characterization of valve and piston motion for a novel bi-chamber fluidic micropump that is electromagnetically actuated. Unique properties of this pump include the ability to pump liquids over a very broad viscosity range (1-5000 mPa-s), extremely small size (0.3mm × 0.6mm × 0.6mm), the capability to be driven by a remote oscillating magnetic field source, fully integrated passive valving, large, straight fluidic paths for low clogging, integrated magnetic flux guides, and a completely monolithic wafer level process to enable low cost manufacturing.
Keywords :
electromagnetic actuators; magnetic field effects; magnetic flux; microfluidics; pumps; valves; viscosity; bi-chamber fluidic micropump; bi-chamber fluidic pump; clogging; electromagnetic actuator; electromagnetic fluidic pump; integrated magnetic flux; magnetic field source; monolithic wafer level process; piston motion; pump liquids; valve motion; viscosity; Pistons; Pumps; Silicon; Springs; Valves; Viscosity;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765703
