• DocumentCode
    2678970
  • Title

    Grooved AT-cut quartz plate

  • Author

    Akio, Ishizaki

  • Author_Institution
    Dept. of Electron., Tokyo Metropolitan Coll. of Aeronaut. Eng., Japan
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    416
  • Lastpage
    419
  • Abstract
    The effect of grooves on the coupled vibrations of AT-cut quartz plates is analyzed by using two-dimensional equations of motion. I calculate the frequency spectra and vibrational patterns and investigate the optimal design parameters (i.e. depth, width, and position of grooves)
  • Keywords
    Q-factor; crystal resonators; elastic constants; frequency stability; vibrations; SiO2; coupled vibrations; elastic constants; energy trapping; frequency spectra; groove depth; groove position; groove width; grooved AT-cut quartz plate; grooves effect; guided waves; minimum frequency difference; mode decoupling; model; optimal design parameters; thickness shear mode; two-dimensional equations of motion; vibrational patterns; Aerospace engineering; Boundary conditions; Educational institutions; Equations; Etching; Frequency; Lithography; Motion analysis; Stress; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International
  • Conference_Location
    Kansas City, MO
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-5838-4
  • Type

    conf

  • DOI
    10.1109/FREQ.2000.887392
  • Filename
    887392
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2678970