Continuous dynamic timing measurements to monitor spring and surface forces in MEMS switch reliability

Author

Kosla, Cezary ; Fitzgerald, Padraig ; Hill, Mark

Author_Institution

Cork Inst. of Technol., Cork, Ireland

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

596

Lastpage

599

Abstract

In this work we demonstrate an automatic reliability detection/prediction system for industry manufactured ohmic MEMS switches based on dynamic time measurements. The developed method allows for constant device monitoring and highlights the influence of both restoring and surface forces evolution on switch reliability. Also for the first time it allows for an identification of an imminent device failure due to its continuous monitoring. We present the scalability of this approach by testing it on six different, industry-manufactured switch types and on a large number of samples.

Keywords

failure analysis; microswitches; reliability; springs (mechanical); time measurement; MEMS switch reliability; automatic reliability detection system; automatic reliability prediction system; continuous dynamic timing measurements; device failure identification; ohmic MEMS switches; spring forces; surface forces; Contacts; Micromechanical devices; Microswitches; Monitoring; Reliability; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765711

Filename

6765711