Title :
Fabrication and testing of piezoelectric hybrid paper for MEMS applications
Author :
Mahadeva, Suresha K. ; Walus, K. ; Stoeber, Boris
Author_Institution :
Univ. of British Columbia, Vancouver, BC, Canada
Abstract :
We have developed and demonstrated a new inexpensive and environmentally friendly functional paper based material that can be used as a piezoelectric substrate for sensing applications. The process involves embedding nanostructured barium titanate (BaTiO3) into a stable matrix of wood fibers via fiber functionalization. This is achieved by employing a layer-by-layer approach, and results in the creation of a positively charged surface on the wood fibers. The treated wood fibers are then immersed in a BaTiO3 suspension, leading to the electrostatic binding of the BaTiO3 nanoparticles. We have investigated hybrid paper samples with five different BaTiO3 concentrations (8-48 wt%), and we have found the highest piezoelectric coefficient at 48 wt% BaTiO3. Our study suggests that functionalizing wood cellulose fibers with nanostructured BaTiO3 is a promising approach to enhancing the functionality and value of paper for developing low-cost microelectromechanical systems (MEMS).
Keywords :
barium compounds; micromechanical devices; nanofabrication; nanoparticles; natural fibres; paper; piezoelectric materials; wood; BaTiO3; MEMS applications; electrostatic binding; fiber functionalization; functional paper based material; layer-by-layer approach; nanoparticles; nanostructured barium titanate; piezoelectric coefficient; piezoelectric hybrid paper; piezoelectric substrate; positively charged surface; sensing applications; suspension; wood fibers; Micromechanical devices; Nanoparticles; Optical fiber sensors; Substrates; Zinc oxide;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765717