Title :
Possibility of cemented carbide as structural material for MEMS
Author :
Morikaku, Toshiyuki ; Fujii, Teruya ; Kuroda, K. ; Takami, Yasuhiro ; Inoue, Shingo ; Namazu, T.
Author_Institution :
Dept. of Mech. & Syst. Eng., Univ. of Hyogo, Himeji, Japan
Abstract :
We discuss the possibility of WC-Co cemented carbide as structural material in MEMS. The cemented carbide is typically used as material for working tool because it has superior characteristics, such as very high Young´s modulus, excellent rigidity, good chemical inertness, and good thermal stability. These are also attractive for mechanical elements in MEMS. We investigate the influences of specimen size and WC-Co composition ratio on mechanical properties of FIB-fabricated WC-Co cemented carbide nanowires by means of on-chip uniaxial tensile testing in FE-SEM. It is presented that Co binder size dependency on the Young´s modulus and fracture strength has been obtained.
Keywords :
Young´s modulus; cermets; cobalt; fracture toughness; micromechanical devices; scanning electron microscopy; shear modulus; tensile testing; thermal stability; tungsten compounds; FE-SEM; FIB-fabricated WC-Co cemented carbide nanowires; MEMS; Young modulus; chemical inertness; copper binder size dependency; fracture strength; mechanical elements; mechanical properties; on-chip uniaxial tensile testing; rigidity; specimen size; structural material; thermal stability; tungsten carbide-cobalt composition ratio; Materials; Mechanical factors; Metals; Micromechanical devices; Nanowires; Optical wavelength conversion; Testing;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765725
