• DocumentCode
    267928
  • Title

    An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out

  • Author

    Groenesteijn, J. ; Droogendijk, H. ; de Boer, M.J. ; Sanders, R.G.P. ; Wiegerink, R.J. ; Krijnen, G.J.M.

  • Author_Institution
    MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
  • fYear
    2014
  • fDate
    26-30 Jan. 2014
  • Firstpage
    696
  • Lastpage
    699
  • Abstract
    We report on an angular accelerometer based on the semicircular channels of the vestibular system. The accelerometer consists of a water-filled circular tube, wherein the fluid flow velocity is measured thermally as a representation for the external angular acceleration. Measurements show a linear response for angular acceleration amplitudes up to 2×105° s-2.
  • Keywords
    accelerometers; flow measurement; fluid dynamics; sensors; angular acceleration sensor; angular accelerometer; external angular acceleration; fluid flow velocity; fully circular fluid-channel; linear response; semicircular channels; thermal read-out; vestibular system; water-filled circular tube; Acceleration; Accelerometers; Electron tubes; Etching; Micromechanical devices; Velocity measurement; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
  • Conference_Location
    San Francisco, CA
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2014.6765736
  • Filename
    6765736
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=267928