Title :
An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out
Author :
Groenesteijn, J. ; Droogendijk, H. ; de Boer, M.J. ; Sanders, R.G.P. ; Wiegerink, R.J. ; Krijnen, G.J.M.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
We report on an angular accelerometer based on the semicircular channels of the vestibular system. The accelerometer consists of a water-filled circular tube, wherein the fluid flow velocity is measured thermally as a representation for the external angular acceleration. Measurements show a linear response for angular acceleration amplitudes up to 2×105° s-2.
Keywords :
accelerometers; flow measurement; fluid dynamics; sensors; angular acceleration sensor; angular accelerometer; external angular acceleration; fluid flow velocity; fully circular fluid-channel; linear response; semicircular channels; thermal read-out; vestibular system; water-filled circular tube; Acceleration; Accelerometers; Electron tubes; Etching; Micromechanical devices; Velocity measurement; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765736
