• DocumentCode
    2679628
  • Title

    Fabrication Of Si Planar Apertured Array For High Speed Near-field Optical Storage And Readout

  • Author

    Lee, Matthew B. ; Nakano, T. ; Yatsui, T. ; Kourogi, Masakatsu ; Tsutsui, K. ; Atoda, N. ; Ohtsu, M.

  • Author_Institution
    Interdisciplimay Graduate School of Science and Engineering, Tokyo Ins fitute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226, JAPAN
  • fYear
    1997
  • fDate
    14-18 July 1997
  • Firstpage
    91
  • Lastpage
    92
  • Keywords
    Apertures; Etching; High speed optical techniques; Optical arrays; Optical buffering; Optical device fabrication; Optical feedback; Optical films; Probes; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-3889-8
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1997.610533
  • Filename
    610533
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2679628