Integrated multi-parameter flow measurement system

Author

Lotters, J.C. ; van der Wouden, E. ; Groenesteijn, J. ; Sparreboom, W. ; Lammerink, T.S.J. ; Wiegerink, R.J.

Author_Institution

Bronkhorst High-Tech BV, Bronkhorst, Netherlands

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

975

Lastpage

978

Abstract

We have designed and realized an integrated multiparameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.

Keywords

Coriolis force; argon; flow measurement; flow sensors; heat transfer; helium; hydrogen; nitrogen; organic compounds; pressure sensors; specific heat; temperature sensors; thermal conductivity; viscosity; water; Ar; H₂; H₂O; He; IPA; N₂; flow analysis; flow density; flow determination; flow rate; flow viscosity; gases; integrated Coriolis flow sensor; integrated multiparameter flow measurement system; liquids; on-chip measurement; pressure sensor; specific heat capacity; thermal conductivity; thermal flow sensor; Fluid flow measurement; Heating; Mathematical model; Pressure measurement; Thermal conductivity; Thermal sensors; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765806

Filename

6765806