DocumentCode
2680086
Title
A method for measuring the thickness of a glass plate
Author
Jian, Zhi-Cheng ; Hsu, Cheng-Chih ; Su, Der-Chin
Author_Institution
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
A method for measuring the thickness of a glass plate is presented by using the heterodyne interferometry and the two-wavelength interferometry. The phase difference variations due to the wavelength shift and the extraction of the glass plate are measured. Then, its thickness can be calculated under the conditions that the refractive index and the data of wavelength shift are specified.
Keywords
heterodyne detection; phase shifting interferometry; refractive index; thickness measurement; glass plate; heterodyne interferometry; phase difference variations; refractive index; thickness measurement; two-wavelength interferometry; wavelength shift; Data mining; Electronic equipment testing; Frequency measurement; Glass; Intensity modulation; Light sources; Optical polarization; Phase measurement; Thickness measurement; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1276951
Filename
1276951
Link To Document