DocumentCode :
2680238
Title :
Al reflow studies for deep-submicron structures : properties and microstructure
Author :
Webster, M.N. ; Dirks, A.G.
Author_Institution :
Philips Research Laboratories
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
82
Lastpage :
83
Keywords :
Artificial intelligence; Electrical resistance measurement; Inorganic materials; Laboratories; Metallization; Microstructure; Rough surfaces; Surface roughness; Temperature; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887519
Filename :
887519
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680238
بازگشت