Title :
Advanced materials for interconnections of the future - need and strategy
Author_Institution :
SRC Center for Advanced Interconnect Science and Technology
Keywords :
Costs; Inorganic materials; Integrated circuit interconnections; Integrated circuit manufacture; Integrated circuit technology; Lead compounds; Materials science and technology; Metallization; Semiconductor device manufacture; Semiconductor materials;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887524
