• DocumentCode
    2680361
  • Title

    Application of HF solutions for the cleaning of TiSi2 surface

  • Author

    Baklanov, M.R. ; Vanhaelemeersch, S. ; Maex, K.

  • Author_Institution
    IMEC
  • fYear
    1997
  • fDate
    16-19 March 1997
  • Firstpage
    110
  • Lastpage
    112
  • Keywords
    Contact resistance; Electrical resistance measurement; Etching; Hafnium; Inorganic materials; Optical films; Silicides; Surface cleaning; Surface resistance; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
  • Conference_Location
    Villard de Lans, France
  • ISSN
    1266-0167
  • Type

    conf

  • DOI
    10.1109/MAM.1998.887531
  • Filename
    887531
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2680361