Title :
Arsenic solubility in single crystalline cobalt disilicide
Author :
Mangelinck, D. ; Cardenas, J. ; Svensson, B.G.
Author_Institution :
Royal Institut of Technolqy, Solid State Electronics
Keywords :
Annealing; Boron; Cobalt; Crystallization; Inorganic materials; Metallization; Silicides; Silicon; Solids; Temperature;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887535
