مرکز منطقه ای اطلاع رساني علوم و فناوري - Titanium monophosphide (TIP) layers as diffusion barriers

DocumentCode :

2680468

Title :

Titanium monophosphide (TIP) layers as diffusion barriers

Author :

Leutenecker, R. ; Froschle, B. ; Ramm, P.

Author_Institution :

Fraunhofer-Institute for Solid State Technology

fYear :

1997

fDate :

16-19 March 1997

Firstpage :

124

Lastpage :

124

Keywords :

Circuit testing; Coatings; Hydrogen; Rapid thermal annealing; Rapid thermal processing; Solid state circuits; Sputtering; Temperature; Tin; Titanium;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location :

Villard de Lans, France

ISSN :

1266-0167

Type :

conf

DOI :

10.1109/MAM.1998.887537

Filename :

887537

Link To Document :