Title :
Implementation of graspless handling system for microparticles using AFM probe
Author :
Ihn, Y.S. ; Kim, Y.C. ; Choi, H.R. ; Lee, S.M. ; Koo, J.C.
Author_Institution :
Sch. of Mech. Eng., Sungkyunkwan Univ., Suwon, South Korea
Abstract :
Physical size of semiconductor components has been reduced and device density has become increased especially during for last years. As a result of this the use of various high precision manipulatable robot systems becomes norm in the industry. Normally the high precision robot system consists of precision staging system, small scale end-effector system, and highly sensitive autonomous sensing system. One of the most popular micromanipulation tasks might be handling of micro-scale objects on a surface. Although many functional aspects and constraints should be considered when the system is constructed, a key concern for the system design is level of dexterity of the manipulator especially when size of the objects to be handled and spatial resolution of the manipulator become smaller than micron or nano scale. And stiction effect has appeared since a micro-contact mechanics phenomena affects more primarily than inertial force in the high precision robot system. Thus a theoretical study has to be developed on a micro-contact mechanics phenomena. In this paper, the organized system is equipped with an omnidirectional accessible manipulation system with a new visual feedback system. Thanks to the enhanced dexterity of the system, in this paper, microparticle stiction problems that could happen to most of small object handling also can be resolved.
Keywords :
atomic force microscopy; end effectors; micromanipulators; semiconductor device manufacture; stiction; AFM probe; autonomous sensing system; graspless handling system; high precision manipulatable robot systems; high precision robot system; microcontact mechanics phenomena; micromanipulation; microparticles; omnidirectional accessible manipulation system; physical size; precision staging system; semiconductor components; small scale end-effector system; stiction effect; visual feedback system; Atomic force microscopy; Cameras; Force feedback; Lithography; Manipulators; Probes; Production systems; Robot kinematics; Robot sensing systems; Service robots;
Conference_Titel :
Intelligent Robots and Systems, 2009. IROS 2009. IEEE/RSJ International Conference on
Conference_Location :
St. Louis, MO
Print_ISBN :
978-1-4244-3803-7
Electronic_ISBN :
978-1-4244-3804-4
DOI :
10.1109/IROS.2009.5354170