DocumentCode
2680526
Title
Investigations of the interaction between different barrier metals and copper surface during the chemical-mechanical polishing
Author
Zeidler, D. ; Stavreva, Z. ; Plotner, M. ; Drescher, K.
Author_Institution
Dresden University of Technology
fYear
1997
fDate
16-19 March 1997
Firstpage
130
Lastpage
130
Keywords
Channel hot electron injection; Chemical processes; Chemical technology; Copper; Corrosion; Galvanizing; Microelectronics; Passivation; Planarization; Slurries;
fLanguage
English
Publisher
ieee
Conference_Titel
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location
Villard de Lans, France
ISSN
1266-0167
Type
conf
DOI
10.1109/MAM.1998.887542
Filename
887542
Link To Document