DocumentCode :
2680526
Title :
Investigations of the interaction between different barrier metals and copper surface during the chemical-mechanical polishing
Author :
Zeidler, D. ; Stavreva, Z. ; Plotner, M. ; Drescher, K.
Author_Institution :
Dresden University of Technology
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
130
Lastpage :
130
Keywords :
Channel hot electron injection; Chemical processes; Chemical technology; Copper; Corrosion; Galvanizing; Microelectronics; Passivation; Planarization; Slurries;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887542
Filename :
887542
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680526
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