DocumentCode :
2680559
Title :
Modification of Al - based metallization for improved surface morphology
Author :
Zaborowski, Michal ; Barcz, A.
Author_Institution :
Institute of Electron Technology
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
134
Lastpage :
135
Keywords :
Aluminum alloys; Annealing; Artificial intelligence; Chromium alloys; Copper alloys; Grain boundaries; Inorganic materials; Integrated circuit metallization; Silicon alloys; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887544
Filename :
887544
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680559
بازگشت