Thermopile infrared array sensor for human detector application

Author

Tanaka, J. ; Shiozaki, M. ; Aita, Fumiji ; Seki, Takaya ; Oba, Makoto

Author_Institution

OMRON Corp., Kyoto, Japan

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

1213

Lastpage

1216

Abstract

This paper reports the design of thermopile infrared sensor for human detector application. Sensitivity and response time of thermopile infrared sensor element are important for human detector application. In order to fulfill the specification, we developed S-shaped structure for thermopile infrared sensor element and fabrication process of chip scale vacuum package for mass production of the thermopile infrared sensors. As the result, 140V/W sensitivity and 17msec response time of the thermopile infrared sensor element are achieved. The thermopile infrared sensor is all fabricated by CMOS processes.

Keywords

CMOS integrated circuits; chip scale packaging; infrared detectors; integrated circuit design; integrated circuit manufacture; integrated circuit technology; thermopiles; CMOS process; S-shaped structure; chip scale vacuum package; human detector application; thermopile infrared array sensor; time 17 ms; Arrays; Detectors; Finite element analysis; Immune system; Infrared sensors; Sensitivity; Time factors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765866

Filename

6765866