Title :
Transfer-printed composite membranes for electrically-tunable organic optical microcavities
Author :
Wang, Aiping ; Chang, Wenge ; Murarka, Aniket ; Lang, Jeffrey H. ; Bulovic, V.
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We demonstrate a method for fabricating organic optical microcavities which can be electrostatically actuated to dynamically tune their optical output spectra. Fabrication of an integrated organic micro-opto-electro-mechanical system (MOEMS) cavity is enabled by the solvent-free additive transfer of a composite membrane. Electrical actuation and optical characterization of a completed cavity show resonance tuning greater than 20 nm for membrane deflections of over 200 nm at 50 V.
Keywords :
integrated optics; integrated optoelectronics; membranes; micro-optomechanical devices; microfabrication; optical fabrication; optical tuning; MOEMS cavity fabrication; composite membrane; dynamic tuning; electrically-tunable organic optical microcavities; electrostatical actuation; integrated organic microoptoelectromechanical system; optical characterization; optical output spectra; solvent-free additive transfer; transfer-printed composite membranes; voltage 50 V; Cavity resonators; Micromechanical devices; Optical device fabrication; Optical filters; Optical interferometry; Optical resonators; Optical sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765867
