مرکز منطقه ای اطلاع رساني علوم و فناوري - Formation of Al<sub>3</sub>Ti during physical vapor deposition of titanium on aluminium

DocumentCode :

2680586

Title :

Formation of Al₃Ti during physical vapor deposition of titanium on aluminium

Author :

Ulmer, L. ; Pitard, F. ; Poncet, O.

Author_Institution :

GRESSI LETI/CEA

fYear :

1997

fDate :

16-19 March 1997

Firstpage :

137

Lastpage :

137

Keywords :

Aluminum; Annealing; Chemical vapor deposition; Electrical resistance measurement; Filling; Kinetic theory; Plugs; Temperature; Tin; Titanium;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location :

Villard de Lans, France

ISSN :

1266-0167

Type :

conf

DOI :

10.1109/MAM.1998.887546

Filename :

887546

Link To Document :