Tunable metamaterials by controlling sub-micron gap for the THz range

Author

Isozaki, Akihiro ; Kan, Tianze ; Takahashi, Hiroki ; Kanda, Natsuki ; Nemoto, N. ; Konishi, Katsumi ; Kuwata-Gonokami, Makoto ; Matsumoto, Kaname ; Shimoyama, Isao

Author_Institution

Grad. Sch. of Inf. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan

fYear

2014

fDate

26-30 Jan. 2014

Firstpage

1221

Lastpage

1224

Abstract

We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.

Keywords

cantilevers; resonators; terahertz metamaterials; SRR; THz range; differential pressure; pneumatic force; resonant frequency; sprit-ring-resonators; sub-micron gap control; terahertz metamaterial; thin cantilever; thin membrane; tunable metamaterials; Capacitance; Educational institutions; Force; Magnetic materials; Metamaterials; Optical ring resonators; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on

Conference_Location

San Francisco, CA

Type

conf

DOI

10.1109/MEMSYS.2014.6765868

Filename

6765868