Title :
Deposition of thin TiN films by low-power reactive magnetron sputtering
Author :
Mikhal´chuk, P.V. ; Orlikovsky, A.A. ; Vasiliev, A.G. ; Lebedev, O.I. ; Zakharov, D.N.
Author_Institution :
Russian Academy of Sciences
Keywords :
Conductivity; Magnetic materials; Magnetic multilayers; Nitrogen; Physics; Sputtering; Substrates; Temperature measurement; Tin; Titanium;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887549
