Title :
A UHF 4th-order band-pass filter based on contour-mode PZT-on-Silicon resonators
Author :
Yagubizade, Hadi ; Darvishi, Mostafa ; Elwenspoek, Miko C. ; Tas, Niels R.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.
Keywords :
UHF filters; band-pass filters; crystal resonators; dielectric resonator filters; lead compounds; pulsed laser deposition; PZT-Si; UHF filter; contour mode resonator; fourth order band-pass filter; pulsed laser deposited coating; size 1 mum; size 3 mum; Band-pass filters; Bandwidth; Frequency measurement; Insertion loss; Resonant frequency; Silicon; Voltage measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765872
