Title :
Influence of processing parameters on selectivity in a cvd-process of copper using Cu/sup +1/(hfac)(TMVS)
Author :
Friese, G. ; Abdul-Hak, A. ; Schwierzi, B. ; Höhne, U.
Author_Institution :
Universitat Hannover
Keywords :
Aluminum alloys; Conductivity; Copper; Electrons; Inductors; Inorganic materials; MOCVD; Metallization; Tungsten; Ultra large scale integration;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887553
