Title :
Chemical beam epitaxy of CoGa on GaAs using GaEt3 and CpCo(CO)2 as dual organometallic sources
Author :
Viguier, N. ; Maury, F.
Author_Institution :
Laboratoire de Cristallochimie
Keywords :
Chemicals; Epitaxial growth; Gallium arsenide; Intermetallic; Lattices; Metallization; Molecular beam epitaxial growth; Temperature distribution; Thermal stability; Transistors;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887555