DocumentCode

2680727

Title

The change of electrical properties of the aluminum-porous silicon contact by thermal annealing

Author

Zimin, S.P. ; Komarov, E.P.

Author_Institution

Yaroslavl State University Sovetskaya

fYear

1997

fDate

16-19 March 1997

Firstpage

161

Lastpage

161

Keywords

Annealing; Charge carriers; Contacts; Etching; Hydrogen; Impurities; Inorganic materials; Passivation; Plasma temperature; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887556

Filename

887556