Variable capacitor with switching mechanism for wide tuning range

We developed a variable capacitor with mechanical switching mechanism and reversible mechanical latching component to enhance tuning ratio. The switching mechanism could connect four sets of capacitors arranged in parallel sequentially by controlling the displacement of a microactuator for abrupt and coarse tuning of total capacitance. Continuous and fine tuning was also achieved by gap-closing mode of interdigitated capacitors. The resultant maximum tuning ratio was 5.71 by combining coarse and fine tuning.