Title :
Properties of tungsten silicide thin films obtained by magnetron sputtering of composite cast targets
Author :
Glebovsky, V.G. ; Ermolov, S.N. ; Motuzenko, V.N. ; Shfinov, E.D.
Author_Institution :
Institute of Solid State Physics, Chernogolovka
Keywords :
Annealing; Chemicals; Etching; Magnetic levitation; Magnetic properties; Powders; Silicides; Silicon; Sputtering; Tungsten;
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
DOI :
10.1109/MAM.1998.887562
