Properties of tungsten silicide thin films obtained by magnetron sputtering of composite cast targets

Author

Glebovsky, V.G. ; Ermolov, S.N. ; Motuzenko, V.N. ; Shfinov, E.D.

Author_Institution

Institute of Solid State Physics, Chernogolovka

fYear

1997

fDate

16-19 March 1997

Firstpage

173

Lastpage

175

Keywords

Annealing; Chemicals; Etching; Magnetic levitation; Magnetic properties; Powders; Silicides; Silicon; Sputtering; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

DOI

10.1109/MAM.1998.887562

Filename

887562

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