DocumentCode :
2680886
Title :
Epitaxial CoSi2 formation by Co/Hf bilayers on Si
Author :
Gebhardt, B. ; Falke, M. ; Giesler, H. ; Teichert, S. ; Beddies, G. ; Hinneberg, H.-J.
Author_Institution :
TU Chemnitz-Zwickau, Institut fur Physik
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
184
Lastpage :
184
Keywords :
Conductivity; Hafnium; Magnetic materials; Plasma measurements; Plasma temperature; Rapid thermal annealing; Solids; Substrates; Temperature distribution; Zirconium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887567
Filename :
887567
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2680886
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