DocumentCode :
2681006
Title :
Solid solution disilicide thin films : formation, structure, properties and application
Author :
Dvorina, L.
Author_Institution :
Institute for problem of materials, Ukrainian Acad. of Sciences
fYear :
1997
fDate :
16-19 March 1997
Firstpage :
201
Lastpage :
202
Keywords :
Crystalline materials; Crystallization; Inorganic materials; Land surface temperature; Plasma temperature; Production; Solids; Sputtering; Temperature dependence; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop
Conference_Location :
Villard de Lans, France
ISSN :
1266-0167
Type :
conf
DOI :
10.1109/MAM.1998.887575
Filename :
887575
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2681006
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