DocumentCode
2681144
Title
Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy
Author
Nakamura, Daisuke ; Takao, Takayuki ; Oki, Yuji ; Maeda, Mitsuo
Author_Institution
Graduate Sch. of Inf. Sci. & Electr. Eng., Kyushu Univ., Fukuoka, Japan
Volume
2
fYear
2003
fDate
15-19 Dec. 2003
Abstract
A nanometer-scaled layer removal of a surface of poly-methylmethacrylate was attained by a single laser shot from a pulsed excimer laser ablation. The combination of the removal and laser fluorescence spectroscopy demonstrated a nanometer-scaled element analysis on a solid surface.
Keywords
excimer lasers; fluorescence; high-speed optical techniques; laser ablation; optical polymers; surface structure; laser ablation atomic fluorescence spectroscopy; nanometer-scaled solid state surface; poly-methylmethacrylate; pulsed excimer laser ablation; trace element analysis; Atom lasers; Atomic beams; Atomic layer deposition; Fluorescence; Laser ablation; Optical pulses; Solid lasers; Solid state circuits; Spectroscopy; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1277028
Filename
1277028
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