DocumentCode

2681151

Title

Zirconium diboride low resistance layers

Author

Andreeva, A.F. ; Statsenko, V.M. ; Klatchkov, L.A.

Author_Institution

Institute for Problems of Material Sciences of Academy of Sciences of Ukraine

fYear

1997

fDate

16-19 March 1997

Firstpage

217

Lastpage

218

Keywords

Annealing; Chemicals; Electric resistance; Sputtering; Temperature; Thermal resistance; Thermal stability; Thin film circuits; Transistors; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location

Villard de Lans, France

ISSN

1266-0167

Type

conf

DOI

10.1109/MAM.1998.887583

Filename

887583