مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2681151

Title :

Zirconium diboride low resistance layers

Author :

Andreeva, A.F. ; Statsenko, V.M. ; Klatchkov, L.A.

Author_Institution :

Institute for Problems of Material Sciences of Academy of Sciences of Ukraine

fYear :

1997

fDate :

16-19 March 1997

Firstpage :

217

Lastpage :

218

Keywords :

Annealing; Chemicals; Electric resistance; Sputtering; Temperature; Thermal resistance; Thermal stability; Thin film circuits; Transistors; Zirconium;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop

Conference_Location :

Villard de Lans, France

ISSN :

1266-0167

Type :

conf

DOI :

10.1109/MAM.1998.887583

Filename :

887583

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2681151