Two-dimensional vertical-cavity surface-emitting laser arrays fabricated by zinc diffusion

Author

Yen, J.L. ; Yang, Y. Jeffrey

Author_Institution

Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan

Volume

2

fYear

2003

fDate

15-19 Dec. 2003

Abstract

Vertical-cavity surface-emitting laser (VCSEL) arrays with seven devices arranged in a honeycomb pattern have been fabricated by a selective zinc diffusion process. An optical coupled theory is used to predict the mode behavior. A mixing in-phase, out-phase supermodes, and individual single mode operation has been observed and the power ratio among these modes is strongly dependent on the device spacing.

Keywords

coupled mode analysis; diffusion; distributed Bragg reflectors; integrated optics; laser cavity resonators; laser modes; optical fabrication; semiconductor laser arrays; surface emitting lasers; zinc; VCSEL; Zn; device spacing; honeycomb pattern; in-phase supermodes; mode behavior; optical coupled theory; out-phase supermodes; selective zinc diffusion process; single mode operation; vertical-cavity surface-emitting laser arrays; zinc diffusion; Diffusion processes; Distributed Bragg reflectors; Laser modes; Optical arrays; Optical coupling; Optical mixing; Phased arrays; Surface emitting lasers; Vertical cavity surface emitting lasers; Zinc;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on

Print_ISBN

0-7803-7766-4

Type

conf

DOI

10.1109/CLEOPR.2003.1277062

Filename

1277062