DocumentCode :
2682258
Title :
Electrodeposition of Co-Ni nanostructures
Author :
Han, Bai ; Ding, Dongyan ; Zhou, Yanting ; He, Yanping ; Liu, Yuzhao ; Li, Ming ; Mao, Dali
Author_Institution :
Inst. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
fYear :
2011
fDate :
25-28 Oct. 2011
Firstpage :
47
Lastpage :
51
Abstract :
Co-Ni films are widely used in electronics industry for their excellent magnetic, mechanical and electrical properties. In this work, the influence of substrate type and deposition parameters on the morphologies of electroplating Co-Ni nanostructures was investigated. It was found that scallop shell-like Co-Ni depositions could be fabricated on copper wafers. The tendency to form the scallop shell-like depositions increased with increase of deposition time and current density. While on silicon wafers, scallop shell-like Co-Ni depositions could not form. Only acupuncture-like nanostructures could be fabricated on silicon wafers at a high current density.
Keywords :
cobalt alloys; current density; electrodeposition; metallic thin films; nanofabrication; nanostructured materials; nickel alloys; CoNi; Cu; copper wafers; current density; electrodeposition; electroplating; morphology; nanostructures; scallop shell-like deposition; thin films; Crystals; Current density; Films; Metals; Morphology; Silicon; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Packaging Materials (APM), 2011 International Symposium on
Conference_Location :
Xiamen
ISSN :
1550-5723
Print_ISBN :
978-1-4673-0148-0
Type :
conf
DOI :
10.1109/ISAPM.2011.6105668
Filename :
6105668
Link To Document :
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