DocumentCode
2682258
Title
Electrodeposition of Co-Ni nanostructures
Author
Han, Bai ; Ding, Dongyan ; Zhou, Yanting ; He, Yanping ; Liu, Yuzhao ; Li, Ming ; Mao, Dali
Author_Institution
Inst. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
fYear
2011
fDate
25-28 Oct. 2011
Firstpage
47
Lastpage
51
Abstract
Co-Ni films are widely used in electronics industry for their excellent magnetic, mechanical and electrical properties. In this work, the influence of substrate type and deposition parameters on the morphologies of electroplating Co-Ni nanostructures was investigated. It was found that scallop shell-like Co-Ni depositions could be fabricated on copper wafers. The tendency to form the scallop shell-like depositions increased with increase of deposition time and current density. While on silicon wafers, scallop shell-like Co-Ni depositions could not form. Only acupuncture-like nanostructures could be fabricated on silicon wafers at a high current density.
Keywords
cobalt alloys; current density; electrodeposition; metallic thin films; nanofabrication; nanostructured materials; nickel alloys; CoNi; Cu; copper wafers; current density; electrodeposition; electroplating; morphology; nanostructures; scallop shell-like deposition; thin films; Crystals; Current density; Films; Metals; Morphology; Silicon; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Packaging Materials (APM), 2011 International Symposium on
Conference_Location
Xiamen
ISSN
1550-5723
Print_ISBN
978-1-4673-0148-0
Type
conf
DOI
10.1109/ISAPM.2011.6105668
Filename
6105668
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