Title :
Fabricating a silicon microlens mold by ICP dry etching
Author :
Chen, R.L. ; Wang, C.M. ; Chang, J.Y.
Author_Institution :
Inst. of Opt. Sci., Nat. Central Univ., Taoyuan, Taiwan
Abstract :
In this paper, a silicon mold, with spherical/aspherical concave microlens arrays, was made by using ICP dry etching technique. A PMMA microlens was molded by using this mold and then tested by SEM, Dektakprofiler and etc.
Keywords :
elemental semiconductors; etching; microlenses; moulding; optical arrays; optical fabrication; optical testing; plasma materials processing; silicon; Dektak profiler; ICP dry etching; PMMA microlens; SEM; Si; aspherical concave microlens arrays; silicon microlens mold fabrication; Cities and towns; Dry etching; Focusing; Ion beams; Lenses; Microoptics; Optical arrays; Optical sensors; Silicon; Testing;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277112
