A micromachined vibration isolation system for a 1 GHz STW resonator

Author

Reid, J. Robert ; Bright, Victor M. ; Kosinski, John A.

Author_Institution

Rome Lab., Hanscom AFB, MA, USA

fYear

1997

fDate

28-30 May 1997

Firstpage

783

Lastpage

790

Abstract

A micromachined system has been developed for reducing the vibration sensitivity of surface transverse wave (STW) resonators. The isolation system consists of a support platform for mounting the STW resonator, four support arms, and a support rim. The entire isolation system measures 8 mm by 9 mm by 0.4 mm without the resonator mounted on the platform. The system acts as a passive vibration isolation system, decreasing the magnitude of high frequency (>1.2 kHz) vibrations. Vibration sensitivity measurements were taken for vibrations with frequencies ranging from 100 Hz to 5 kHz. The measured data show that the system performs as expected with a low frequency (<500 Hz) vibration sensitivity of 1.8* 10^-8/g and a high frequency roll off of 12 dB/octave

Keywords

micromachining; surface acoustic wave resonators; vibrations; 1 GHz; 100 Hz to 5 kHz; STW resonator; micromachined passive vibration isolation system; roll off; support arm; support platform; support rim; surface transverse wave resonator; vibration sensitivity; Acceleration; Acoustic waves; Circuits; Doppler radar; Frequency measurement; Phase noise; Satellite navigation systems; Surface acoustic waves; Vibration measurement; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International

Conference_Location

Orlando, FL

Print_ISBN

0-7803-3728-X

Type

conf

DOI

10.1109/FREQ.1997.639191

Filename

639191