CRLH mm-wave directional coupler on silicon substrate microprocessed by laser ablation

Author

Sajin, Gheorghe ; Bunea, Alina Cristina ; Craciunoiu, Florea ; Dinescu, Adrian ; Zamfirescu, Marian ; Dabu, Razvan

Author_Institution

IMT Bucharest, Bucharest, Romania

fYear

2011

fDate

7-9 Nov. 2011

Firstpage

1

Lastpage

4

Abstract

This work deals with the development and manufacturing of a Composite Right / Left Handed (CRLH) coupler structure for the millimeter-wave range. The device is made of CRLH artificial lines in a coplanar waveguide configuration (CPW). The device was processed on a 0.5 mm thick silicon substrate with a thermally grown 1 μm SiO₂ layer and a 3000 Å Au / 500 Å Cr metallization layer deposited on it. The silicon substrate offers the possibility of future integration in complex mm-wave circuits. The processing technology was laser ablation, known as a modern method for obtaining the device functional structure.

Keywords

coplanar waveguides; integrated circuit metallisation; laser ablation; metamaterials; millimetre wave directional couplers; millimetre wave integrated circuits; CPW; CRLH artificial lines; CRLH millimetre wave directional coupler; composite right-left handed coupler structure; coplanar waveguide configuration; laser ablation; metallization layer deposition; millimetre wave circuits; silicon substrate; size 0.5 mm; size 1 mum; Capacitors; Coplanar waveguides; Couplers; Laser ablation; Microwave filters; Silicon; Substrates; Metamaterials; directional coupler; silicon substrate;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwaves, Communications, Antennas and Electronics Systems (COMCAS), 2011 IEEE International Conference on

Conference_Location

Tel Aviv

Print_ISBN

978-1-4577-1692-8

Type

conf

DOI

10.1109/COMCAS.2011.6105774

Filename

6105774