Title :
A new analytic model for the description of the intrinsic oxide breakdown statistics of ultra-thin oxides
Author :
Degreave, R. ; Roussel, Ph ; Groeseneken, G. ; Maes, H.E.
Author_Institution :
IMEC
Keywords :
Analytical models; Anodes; Cathodes; Degradation; Dielectric breakdown; Electric breakdown; Electron traps; Probability; Statistical analysis; Weibull distribution;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888180
