A microwave generated plasma for ion implantation studies

Summary form only given. Industrially acceptable methods of plasma ion implantation not only require an efficient means of switching the negative high-voltage pulses, but also require an energy efficient plasma generation system. In order to achieve this, a nonmagnetized microwave generated plasma was designed and is being built. The power source is a model PPS-2.5 AS 2500-W, 2.45-GHz Varian (Eimac) microwave power pack with a WR-340 waveguide port. The forward and reflected power is measured with a model EW3-DPM3S Varian power meter. A model EW3-HH Varian HH tuner is included for impedance matching. A model GS315 Gerling RMS step transition, which steps a WR-340 (S-band) waveguide to a WR-284 waveguide, is included. A standard EH tuner is used for most of the matching since the plasma is a changing load. The cavity was designed so that several TE modes (other than the dominant mode) will be set up in the resonator to give a quasi-uniform field distribution, so that the plasma can have an approximately uniform number density