Title :
The F2-laser micro-scalpel for photonic applications
Author :
Jianzhao Li ; Nejadmalayeri, A.H. ; Yick, A. ; Herman, Peter R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Abstract :
Surface-relief microstructures- microchannels, kinoforms, diffraction gratings - have been directly sculptured on optically transparent glasses with 157-nm radiation from a vacuum-ultraviolet F2-laser for biophotonic lab-on-a-chip and diffractive optical element applications.
Keywords :
diffraction gratings; diffractive optical elements; excimer lasers; fluorine; laser beam etching; laser beam machining; micro-optics; microfluidics; micromachining; optical glass; 157 nm; F2; F2-laser micro-scalpel; biophotonic lab-on-a-chip; diffraction gratings; diffractive optical element; kinoforms; microchannels; optically transparent glasses; surface-relief microstructures; Atomic force microscopy; Cleaning; Fiber gratings; Fiber lasers; Glass; Laser ablation; Microchannel; Optical fibers; Optical microscopy; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277240
