Title :
Experimental validation of mechanical stress models by micro-raman spectroscopy
Author :
de Wolf, I. ; Pozzat, G. ; Pinardl, K. ; Howard, D.J. ; Ignat, M. ; Jain, S.C. ; Maes, H.E.
Author_Institution :
IMEC
Keywords :
Frequency; Microelectronics; Numerical models; Oxidation; Raman scattering; Rapid thermal processing; Spectroscopy; Sputter etching; Stress; Substrates;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888208
