• DocumentCode
    2684980
  • Title

    Characterization of TiO2/SiO2 hybrid sol-gel glass and its use for fabrication of micro-optical elements

  • Author

    Yu, Weixing ; Yuan, X.-C. ; Ngo, N.Q. ; Cheong, W.C. ; Koudriachov, V.

  • Author_Institution
    Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
  • Volume
    2
  • fYear
    2003
  • fDate
    15-19 Dec. 2003
  • Abstract
    We demonstrated fabrication of micro-optical elements in a TiO2/SiO2 hybrid sol-gel glass with different facilities including HEBS gray scale mask, laser direct writer and e-beam lithography. With different facility, we first calibrated this material and then designed and fabricated micro-optical elements according to calibration result. Micro-optical elements including blazed gratings and microlenses were fabricated successfully.
  • Keywords
    diffraction gratings; electron beam lithography; masks; microlenses; optical fabrication; optical glass; organic-inorganic hybrid materials; silicon compounds; sol-gel processing; titanium compounds; HEBS gray scale mask; TiO2-SiO2; TiO2/SiO2 hybrid sol-gel glass; blazed gratings; e-beam lithography; laser direct writer; micro-optical elements fabrication; microlenses; Calibration; Glass; Gratings; Lenses; Microoptics; Optical device fabrication; Optical films; Optical refraction; Optical sensors; Optical variables control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
  • Print_ISBN
    0-7803-7766-4
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2003.1277250
  • Filename
    1277250
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2684980