DocumentCode
2685015
Title
Nanoscopic evaluation of semiconductor properties by scanning probe microscopies
Author
Balk, L.J. ; Heiderhoff, R. ; Koschinki, P. ; Maywald, M.
Author_Institution
Bergische Universitat - Gesamthochschule Wuppertal
fYear
1996
fDate
1996
Firstpage
1767
Lastpage
1774
Keywords
Current measurement; Electron beams; Mechanical factors; Scanning electron microscopy; Scanning probe microscopy; Semiconductor materials; Space charge; Spatial resolution; Thermal conductivity; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN
0-7803-3369-1
Type
conf
DOI
10.1109/ESREF.1996.888212
Filename
888212
Link To Document