Title :
A new wafer level reliability method for evaluation of ionic induced PMOSFET drift effects
Author :
Dreizner, A. ; Nagel, J. ; Schafe, R.
Author_Institution :
ITT Intermetall
Keywords :
Capacitance measurement; Capacitance-voltage characteristics; Contamination; Degradation; Dielectrics; MOSFET circuits; Pollution measurement; Stress measurement; Temperature; Voltage measurement;
Conference_Titel :
Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on
Print_ISBN :
0-7803-3369-1
DOI :
10.1109/ESREF.1996.888231